Phosphine (PH3)

Phosphine (PH3) Sensors

Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

We have also introduced the PH3-BE sensor specifically for food storage where higher concentrations of Phosphine are encountered.

Available in A and B series.

Data Sheets
File Description Type
PH3-BE Compact, high concentration Data Sheet Download
PH3-B1 Compact Data Sheet Download
PH3-A1 Small Data Sheet Download